Inventor

KALK FRANKLIN DEAN

US7 patents

⚠️ This page may combine multiple inventors who share the name “KALK FRANKLIN DEAN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

DUPONT PHOTOMASKS INC

6 patents

US6721695B1Apr 13, 2004

Method and apparatus for evaluating the runability of a photomask inspection tool

DUPONT PHOTOMASKS INC55 citations92

US6911283B1Jun 28, 2005

Method and apparatus for coupling a pellicle to a photomask using a non-distorting mechanism

DUPONT PHOTOMASKS INC34 citations88

US6780548B1Aug 24, 2004

Alternating aperture phase shifting photomask with improved transmission balancing

DUPONT PHOTOMASKS INC13 citations82

US6803158B1Oct 12, 2004

Photomask and method for forming an opaque border on the same

DUPONT PHOTOMASKS INC15 citations81

US6482557B1Nov 19, 2002

Method and apparatus for evaluating the runability of a photomask inspection tool

DUPONT PHOTOMASKS INC14 citations80

US6759171B1Jul 6, 2004

Alternating aperture phase shifting photomask with improved intensity balancing

DUPONT PHOTOMASKS INC11 citations71

TOPPAN PHOTOMASKS INC

1 patent

US7056623B2Jun 6, 2006

Photomask and method for manufacturing the same

TOPPAN PHOTOMASKS INC0 citations48