Inventor
COLBURN MATTHEW
US9 patents
⚠️ This page may combine multiple inventors who share the name “COLBURN MATTHEW”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
UNIV TEXAS
8 patentsUS6986975B2Jan 17, 2006
Method of aligning a template with a substrate employing moire patterns
UNIV TEXAS73 citations98
US6921615B2Jul 26, 2005
High-resolution overlay alignment methods for imprint lithography
UNIV TEXAS161 citations98
US6916585B2Jul 12, 2005
Method of varying template dimensions to achieve alignment during imprint lithography
UNIV TEXAS108 citations98
US6842229B2Jan 11, 2005
Imprint lithography template comprising alignment marks
UNIV TEXAS132 citations98
US6696220B2Feb 24, 2004
Template for room temperature, low pressure micro-and nano-imprint lithography
UNIV TEXAS606 citations98
US6902853B2Jun 7, 2005
Dual wavelength method of determining a relative position of a substrate and a template
UNIV TEXAS48 citations96
US6919152B2Jul 19, 2005
High resolution overlay alignment systems for imprint lithography
UNIV TEXAS57 citations95
US7060324B2Jun 13, 2006
Method of creating a dispersion of a liquid on a substrate
UNIV TEXAS26 citations92