Inventor

SREENIVASAN S V

US5 patents

⚠️ This page may combine multiple inventors who share the name “SREENIVASAN S V”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

UNIV TEXAS

4 patents

US6696220B2Feb 24, 2004

Template for room temperature, low pressure micro-and nano-imprint lithography

UNIV TEXAS606 citations98

US6919152B2Jul 19, 2005

High resolution overlay alignment systems for imprint lithography

UNIV TEXAS57 citations95

US10816482B2Oct 27, 2020

High throughput, high resolution optical metrology for reflective and transmissive nanophotonic devices

UNIV TEXAS6 citations69

US10336062B2Jul 2, 2019

Systems and methods for precision inkjet printing

UNIV TEXAS4 citations69

BOARDS OF REGENTS THE UNIVERSI

1 patent

US6954275B2Oct 11, 2005

Methods for high-precision gap and orientation sensing between a transparent template and substrate for imprint lithography

BOARDS OF REGENTS THE UNIVERSI94 citations96