Inventor
VAN SCHAIK WILLEM
NL8 patents
⚠️ This page may combine multiple inventors who share the name “VAN SCHAIK WILLEM”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASML NETHERLANDS BV
7 patentsUS6724460B2Apr 20, 2004
Lithographic projection apparatus, device manufacturing method, device manufactured thereby, cleaning unit and method of cleaning contaminated objects
ASML NETHERLANDS BV64 citations93
US6538716B2Mar 25, 2003
Lithographic apparatus, device manufacturing method, and device manufactured thereby
ASML NETHERLANDS BV24 citations92
US6828569B2Dec 7, 2004
Lithographic projection apparatus, device manufacturing method and device manufactured thereby
ASML NETHERLANDS BV33 citations91
US6924492B2Aug 2, 2005
Lithographic apparatus, device manufacturing method, and device manufactured thereby
ASML NETHERLANDS BV14 citations82
US7115886B2Oct 3, 2006
Lithographic projection apparatus, device manufacturing method and device manufactured thereby
ASML NETHERLANDS BV5 citations72
US10295916B2May 21, 2019
EUV source chamber and gas flow regime for lithographic apparatus, multi-layer mirror and lithographic apparatus
ASML NETHERLANDS BV2 citations70
US7508487B2Mar 24, 2009
Lithographic apparatus, device manufacturing method, and device manufactured thereby
ASML NETHERLANDS BV5 citations60