Inventor
MERTENS BASTIAAN MATTHIAS
NL12 patents
⚠️ This page may combine multiple inventors who share the name “MERTENS BASTIAAN MATTHIAS”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASML NETHERLANDS BV
11 patentsUS6614505B2Sep 2, 2003
Lithographic projection apparatus, device manufacturing method, and device manufactured thereby
ASML NETHERLANDS BV99 citations97
US6724460B2Apr 20, 2004
Lithographic projection apparatus, device manufacturing method, device manufactured thereby, cleaning unit and method of cleaning contaminated objects
ASML NETHERLANDS BV64 citations93
US6828569B2Dec 7, 2004
Lithographic projection apparatus, device manufacturing method and device manufactured thereby
ASML NETHERLANDS BV33 citations91
US9939737B2Apr 10, 2018
Electrostatic clamp
ASML NETHERLANDS BV6 citations78
US6862075B2Mar 1, 2005
Lithographic projection apparatus, device manufacturing method, and device manufacturing thereby
ASML NETHERLANDS BV8 citations73
US7115886B2Oct 3, 2006
Lithographic projection apparatus, device manufacturing method and device manufactured thereby
ASML NETHERLANDS BV5 citations72
US7684012B2Mar 23, 2010
Lithographic device, device manufacturing method and device manufactured thereby
ASML NETHERLANDS BV2 citations62
US7279690B2Oct 9, 2007
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV2 citations60
US7491951B2Feb 17, 2009
Lithographic apparatus, system and device manufacturing method
ASML NETHERLANDS BV2 citations59
US7151589B2Dec 19, 2006
Lithographic apparatus and patterning device transport
ASML NETHERLANDS BV3 citations59
US7248340B2Jul 24, 2007
Lithographic apparatus and patterning device transport
ASML NETHERLANDS BV0 citations48