Inventor
MEILING HANS
NL14 patents
⚠️ This page may combine multiple inventors who share the name “MEILING HANS”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASML NETHERLANDS BV
10 patentsUS6781673B2Aug 24, 2004
Mask handling apparatus, lithographic projection apparatus, device manufacturing method and device manufactured thereby
ASML NETHERLANDS BV56 citations94
US6724460B2Apr 20, 2004
Lithographic projection apparatus, device manufacturing method, device manufactured thereby, cleaning unit and method of cleaning contaminated objects
ASML NETHERLANDS BV64 citations93
US6828569B2Dec 7, 2004
Lithographic projection apparatus, device manufacturing method and device manufactured thereby
ASML NETHERLANDS BV33 citations91
US6879374B2Apr 12, 2005
Device manufacturing method, device manufactured thereby and a mask for use in the method
ASML NETHERLANDS BV13 citations84
US7522263B2Apr 21, 2009
Lithographic apparatus and method
ASML NETHERLANDS BV14 citations78
US7115886B2Oct 3, 2006
Lithographic projection apparatus, device manufacturing method and device manufactured thereby
ASML NETHERLANDS BV5 citations72
US7095479B2Aug 22, 2006
Lithographic apparatus, device manufacturing method and device manufactured thereby
ASML NETHERLANDS BV9 citations72
US7492443B2Feb 17, 2009
Device manufacturing method, device manufactured thereby and a mask for use in the method
ASML NETHERLANDS BV3 citations63
US7151589B2Dec 19, 2006
Lithographic apparatus and patterning device transport
ASML NETHERLANDS BV3 citations59
US7248340B2Jul 24, 2007
Lithographic apparatus and patterning device transport
ASML NETHERLANDS BV0 citations48