Inventor
KOSTER NORBERTUS BENEDICTUS
NL14 patents
⚠️ This page may combine multiple inventors who share the name “KOSTER NORBERTUS BENEDICTUS”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASML NETHERLANDS BV
7 patentsUS6614505B2Sep 2, 2003
Lithographic projection apparatus, device manufacturing method, and device manufactured thereby
ASML NETHERLANDS BV99 citations97
US6724460B2Apr 20, 2004
Lithographic projection apparatus, device manufacturing method, device manufactured thereby, cleaning unit and method of cleaning contaminated objects
ASML NETHERLANDS BV64 citations93
US6828569B2Dec 7, 2004
Lithographic projection apparatus, device manufacturing method and device manufactured thereby
ASML NETHERLANDS BV33 citations91
US6862075B2Mar 1, 2005
Lithographic projection apparatus, device manufacturing method, and device manufacturing thereby
ASML NETHERLANDS BV8 citations73
US7115886B2Oct 3, 2006
Lithographic projection apparatus, device manufacturing method and device manufactured thereby
ASML NETHERLANDS BV5 citations72
US7963144B2Jun 21, 2011
Gas analyzing system, lithographic apparatus and method of improving a sensitivity of a gas analyzing system
ASML NETHERLANDS BV0 citations49
US7624617B2Dec 1, 2009
Gas analyzing system, lithographic apparatus and method of improving a sensitivity of a gas analyzing system
ASML NETHERLANDS BV0 citations49
KOSTER NORBERTUS BENEDICTUS
2 patentsUS8480807B2Jul 9, 2013
Method and an apparatus for cleaning and/or sterilization of an object provided in a sealed enclosure
KOSTER NORBERTUS BENEDICTUS0 citations36
US8749245B2Jun 10, 2014
Ion gauge, a monitoring system and a method for determining a total integrated concentration of substances having specific molecular weight in a gas sample
KOSTER NORBERTUS BENEDICTUS0 citations35