Inventor
MAVLIEV RASHID A
US8 patents
⚠️ This page may combine multiple inventors who share the name “MAVLIEV RASHID A”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
7 patentsUS7513062B2Apr 7, 2009
Single wafer dryer and drying methods
APPLIED MATERIALS INC23 citations91
US7452264B2Nov 18, 2008
Pad cleaning method
APPLIED MATERIALS INC18 citations83
US7427340B2Sep 23, 2008
Conductive pad
APPLIED MATERIALS INC16 citations82
US7344432B2Mar 18, 2008
Conductive pad with ion exchange membrane for electrochemical mechanical polishing
APPLIED MATERIALS INC3 citations60
US7815787B2Oct 19, 2010
Electrolyte retaining on a rotating platen by directional air flow
APPLIED MATERIALS INC1 citations51
US7520968B2Apr 21, 2009
Conductive pad design modification for better wafer-pad contact
APPLIED MATERIALS INC1 citations51
US7407433B2Aug 5, 2008
Pad characterization tool
APPLIED MATERIALS INC0 citations50