Inventor
WADENSWEILER RALPH M
US9 patents
Patents
9 patentsUS5978202ANov 2, 1999
Electrostatic chuck having a thermal transfer regulator pad
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US7285036B2Oct 23, 2007
Pad assembly for electrochemical mechanical polishing
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US7029365B2Apr 18, 2006
Pad assembly for electrochemical mechanical processing
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US7137868B2Nov 21, 2006
Pad assembly for electrochemical mechanical processing
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US7134948B2Nov 14, 2006
Magnetically secured retaining ring
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US7427340B2Sep 23, 2008
Conductive pad
APPLIED MATERIALS INC16 citations82
US6459382B1Oct 1, 2002
Over clamp sensor
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US7290976B2Nov 6, 2007
Semiconductor substrate processing apparatus with a passive substrate gripper
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US7678245B2Mar 16, 2010
Method and apparatus for electrochemical mechanical processing
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