P

Inventor

BAREKET NOAH

US50 patents
⚠️ This page may combine multiple inventors who share the name “BAREKET NOAH”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

KLA TENCOR TECH CORP

14 patents
US7317531B2Jan 8, 2008

Apparatus and methods for detecting overlay errors using scatterometry

KLA TENCOR TECH CORP83 citations98
US7280230B2Oct 9, 2007

Parametric profiling using optical spectroscopic systems

KLA TENCOR TECH CORP71 citations97
US7301634B2Nov 27, 2007

Apparatus and methods for detecting overlay errors using scatterometry

KLA TENCOR TECH CORP35 citations96
US7298481B2Nov 20, 2007

Apparatus and methods for detecting overlay errors using scatterometry

KLA TENCOR TECH CORP46 citations96
US7280212B2Oct 9, 2007

Apparatus and methods for detecting overlay errors using scatterometry

KLA TENCOR TECH CORP45 citations96
US7483133B2Jan 27, 2009

Multiple angle of incidence spectroscopic scatterometer system

KLA TENCOR TECH CORP22 citations93
US7933016B2Apr 26, 2011

Apparatus and methods for detecting overlay errors using scatterometry

KLA TENCOR TECH CORP15 citations92
US7716003B1May 11, 2010

Model-based measurement of semiconductor device features with feed forward use of data for dimensionality reduction

KLA TENCOR TECH CORP23 citations92
US7663753B2Feb 16, 2010

Apparatus and methods for detecting overlay errors using scatterometry

KLA TENCOR TECH CORP19 citations92
US7379183B2May 27, 2008

Apparatus and methods for detecting overlay errors using scatterometry

KLA TENCOR TECH CORP18 citations92
US7633070B2Dec 15, 2009

Substrate processing apparatus and method

KLA TENCOR TECH CORP8 citations84
US7515253B2Apr 7, 2009

System for measuring a sample with a layer containing a periodic diffracting structure

KLA TENCOR TECH CORP18 citations84
US7826072B1Nov 2, 2010

Method for optimizing the configuration of a scatterometry measurement system

KLA TENCOR TECH CORP6 citations62
US6577389B2Jun 10, 2003

System and methods for inspection of transparent mask substrates

KLA TENCOR TECH CORP5 citations61

AMO DEV LLC

8 patents

KLA TENCOR CORP

6 patents

OPTIMEDICA CORP

6 patents

BLUEMORPH LLC

4 patents

KLA INSTR CORP

2 patents

LOCKHEED MISSILES SPACE

2 patents

(unassigned)

1 patent

US NAVY

1 patent

LEVINSKI VLADIMIR

1 patent

KLA TENCOR

1 patent

AMO DEVLOPMENT LLC

1 patent

ZYWNO MAREK

1 patent

LOCKHEED MISSLES & SPACE COMPA

1 patent

MYNA LIFE TECH INC

1 patent