Inventor

WACK DANIEL C

US19 patents

⚠️ This page may combine multiple inventors who share the name “WACK DANIEL C”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

WACK DANIEL C

KLA TENCOR CORP

Parametric profiling using optical spectroscopic systems

Optical characterization systems employing compact synchrotron radiation sources

Bright and dark field scatterometry systems for line roughness metrology

Optical characterization systems employing compact synchrotron radiation sources

Measurement and control of strained devices

System and method for generation of extreme ultraviolet light

Inspection system with non-circular pupil

Measurement and control of strained devices

System for scatterometric measurements and applications

KLA TENCOR TECH CORP

Parametric profiling using optical spectroscopic systems

System for scatterometric measurements and applications

Model-based measurement of semiconductor device features with feed forward use of data for dimensionality reduction

System for scatterometric measurements and applications

System for measuring a sample with a layer containing a periodic diffracting structure

System for scatterometric measurements and applications

Method for optimizing the configuration of a scatterometry measurement system

KLA CORP

Optical etendue matching methods for extreme ultraviolet metrology

Fast phase-shift interferometry by laser frequency shift

WACK DANIEL C

Apparatus for EUV imaging and methods of using same