P

Inventor

KABE YOSHIRO

JP24 patents
⚠️ This page may combine multiple inventors who share the name “KABE YOSHIRO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

TOKYO ELECTRON LTD

10 patents
US7524774B2Apr 28, 2009

Manufacturing method of semiconductor device, semiconductor manufacturing apparatus, plasma nitridation method, computer recording medium, and program

TOKYO ELECTRON LTD11 citations84
US8372761B2Feb 12, 2013

Plasma oxidation processing method, plasma processing apparatus and storage medium

TOKYO ELECTRON LTD9 citations83
US7887637B2Feb 15, 2011

Method for cleaning treatment chamber in substrate treating apparatus and method for detecting endpoint of cleaning

TOKYO ELECTRON LTD7 citations81
US8034179B2Oct 11, 2011

Method for insulating film formation, storage medium from which information is readable with computer, and processing system

TOKYO ELECTRON LTD3 citations63
US7981785B2Jul 19, 2011

Method for manufacturing semiconductor device and plasma oxidation method

TOKYO ELECTRON LTD3 citations63
US7972973B2Jul 5, 2011

Method for forming silicon oxide film, plasma processing apparatus and storage medium

TOKYO ELECTRON LTD3 citations62
US7910495B2Mar 22, 2011

Plasma oxidizing method, plasma processing apparatus, and storage medium

TOKYO ELECTRON LTD5 citations61
US8026187B2Sep 27, 2011

Method of forming silicon oxide film and method of production of semiconductor memory device using this method

TOKYO ELECTRON LTD0 citations52
US8043979B2Oct 25, 2011

Plasma oxidizing method, storage medium, and plasma processing apparatus

TOKYO ELECTRON LTD0 citations51
US8003484B2Aug 23, 2011

Method for forming silicon oxide film, plasma processing apparatus and storage medium

TOKYO ELECTRON LTD0 citations41

KAWASAKI HEAVY IND LTD

5 patents

SKYWORKS SOLUTIONS INC

4 patents

KABE YOSHIRO

3 patents

HORI MASARU

1 patent

UNIV NAGOYA NAT UNIV CORP

1 patent