Inventor
KABE YOSHIRO
JP24 patents
⚠️ This page may combine multiple inventors who share the name “KABE YOSHIRO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
10 patentsUS7524774B2Apr 28, 2009
Manufacturing method of semiconductor device, semiconductor manufacturing apparatus, plasma nitridation method, computer recording medium, and program
TOKYO ELECTRON LTD11 citations84
US8372761B2Feb 12, 2013
Plasma oxidation processing method, plasma processing apparatus and storage medium
TOKYO ELECTRON LTD9 citations83
US7887637B2Feb 15, 2011
Method for cleaning treatment chamber in substrate treating apparatus and method for detecting endpoint of cleaning
TOKYO ELECTRON LTD7 citations81
US8034179B2Oct 11, 2011
Method for insulating film formation, storage medium from which information is readable with computer, and processing system
TOKYO ELECTRON LTD3 citations63
US7981785B2Jul 19, 2011
Method for manufacturing semiconductor device and plasma oxidation method
TOKYO ELECTRON LTD3 citations63
US7972973B2Jul 5, 2011
Method for forming silicon oxide film, plasma processing apparatus and storage medium
TOKYO ELECTRON LTD3 citations62
US7910495B2Mar 22, 2011
Plasma oxidizing method, plasma processing apparatus, and storage medium
TOKYO ELECTRON LTD5 citations61
US8026187B2Sep 27, 2011
Method of forming silicon oxide film and method of production of semiconductor memory device using this method
TOKYO ELECTRON LTD0 citations52
US8043979B2Oct 25, 2011
Plasma oxidizing method, storage medium, and plasma processing apparatus
TOKYO ELECTRON LTD0 citations51
US8003484B2Aug 23, 2011
Method for forming silicon oxide film, plasma processing apparatus and storage medium
TOKYO ELECTRON LTD0 citations41
KAWASAKI HEAVY IND LTD
5 patentsUS10259030B2Apr 16, 2019
Spinning forming device
KAWASAKI HEAVY IND LTD2 citations71
US10413999B2Sep 17, 2019
Methods of manufacturing axisymmetric body and axisymmetric product
KAWASAKI HEAVY IND LTD1 citations60
US10882094B2Jan 5, 2021
Spinning forming method
KAWASAKI HEAVY IND LTD0 citations50
US10632522B2Apr 28, 2020
Method of manufacturing preliminary formed body and axisymmetrical component
KAWASAKI HEAVY IND LTD0 citations40
US10259029B2Apr 16, 2019
Spinning forming device
KAWASAKI HEAVY IND LTD0 citations40
SKYWORKS SOLUTIONS INC
4 patentsUS11394364B2Jul 19, 2022
Acoustic wave device with anti-reflection layer
SKYWORKS SOLUTIONS INC11 citations85
US11855603B2Dec 26, 2023
Methods of manufacturing acoustic wave device with anti-reflection layer
SKYWORKS SOLUTIONS INC3 citations72
US12255600B2Mar 18, 2025
Methods of manufacturing acoustic wave device with anti-reflection layer
SKYWORKS SOLUTIONS INC0 citations62
US11522515B2Dec 6, 2022
Acoustic wave device including interdigital electrodes covered by silicon oxynitride film
SKYWORKS SOLUTIONS INC1 citations62
KABE YOSHIRO
3 patentsUS8389420B2Mar 5, 2013
Method and apparatus for forming silicon oxide film
KABE YOSHIRO2 citations61
US8105958B2Jan 31, 2012
Semiconductor device manufacturing method and plasma oxidation treatment method
KABE YOSHIRO2 citations60
US8318267B2Nov 27, 2012
Method and apparatus for forming silicon oxide film
KABE YOSHIRO1 citations48