Inventor
OSHIMA TORU
JP6 patents
⚠️ This page may combine multiple inventors who share the name “OSHIMA TORU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
PANASONIC CORP
3 patentsFUJITSU LTD
3 patentsUS5631113AMay 20, 1997
Electron-beam exposure system for reduced distortion of electron beam spot
FUJITSU LTD7 citations73
US5444257AAug 22, 1995
Electron-beam exposure system for reduced distortion of electron beam spot
FUJITSU LTD8 citations73
US6615477B2Sep 9, 2003
Method and apparatus for processing workpiece by using X-Y stage capable of improving position accuracy
FUJITSU LTD7 citations70