Inventor

LEE-CHIH YEH

TW2 patents

⚠️ This page may combine multiple inventors who share the name “LEE-CHIH YEH”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

TAIWN SEMICONDUCTOR MFG COMPANY LTD

1 patent

US9256142B2Feb 9, 2016

Pellicle mounting system and method

TAIWN SEMICONDUCTOR MFG COMPANY LTD3 citations63

LEE HSIN-CHANG

1 patent

US8656318B2Feb 18, 2014

System and method for combined intraoverlay metrology and defect inspection

LEE HSIN-CHANG0 citations49