Inventor

Kanzaki Koichiro

JP2 patents

Patents

2 patents

US10928732B2Feb 23, 2021

Substrate liquid processing apparatus, substrate liquid processing method, and storage medium

TOKYO ELECTRON LTD0 citations44

US10458010B2Oct 29, 2019

Substrate liquid processing apparatus, substrate liquid processing method, and storage medium

TOKYO ELECTRON LTD0 citations34