Inventor
TANIGUCHI MICHIO
JP18 patents
⚠️ This page may combine multiple inventors who share the name “TANIGUCHI MICHIO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
DAIHEN CORP
13 patentsUS6291999B1Sep 18, 2001
Plasma monitoring apparatus
DAIHEN CORP100 citations97
US5079507AJan 7, 1992
Automatic impedance adjusting apparatus for microwave load and automatic impedance adjusting method therefor
DAIHEN CORP100 citations96
US6755092B2Jun 29, 2004
Conveying device
DAIHEN CORP21 citations90
US6543306B1Apr 8, 2003
Conveying device
DAIHEN CORP21 citations90
US6401653B1Jun 11, 2002
Microwave plasma generator
DAIHEN CORP28 citations89
US10014162B2Jul 3, 2018
Plasma generation apparatus for generating toroidal plasma
DAIHEN CORP2 citations72
US7630220B2Dec 8, 2009
High frequency power supply
DAIHEN CORP7 citations72
US5399977AMar 21, 1995
Microwave power source apparatus for microwave oscillator comprising means for automatically adjusting progressive wave power and control method therefor
DAIHEN CORP8 citations71
US5760544AJun 2, 1998
Magnetron microwave generator with filament-life diagnostic circuit
DAIHEN CORP9 citations70
US11309164B2Apr 19, 2022
High-frequency power supply system
DAIHEN CORP4 citations62
US6726803B2Apr 27, 2004
Multi-sectional plasma generator with discharge gaps between multiple elements forming a plasma discharge cavity
DAIHEN CORP3 citations60
US5315212AMay 24, 1994
Plasma processing apparatus for generating uniform strip-shaped plasma by propagating microwave through rectangular slit
DAIHEN CORP2 citations53
US10306744B2May 28, 2019
Plasma generation apparatus and high-frequency power source
DAIHEN CORP0 citations32