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Inventor
IKENARI TATSUYA
JP
4 patents
⚠️ This page may combine multiple inventors who share the name “IKENARI TATSUYA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
DAIHEN CORP
2 patents
US7221102B2
May 22, 2007
High-frequency power supply device
DAIHEN CORP
20 citations
90
US7630220B2
Dec 8, 2009
High frequency power supply
DAIHEN CORP
7 citations
72
TOKYO ELECTRON LTD
1 patent
US9355822B2
May 31, 2016
Plasma processing apparatus
TOKYO ELECTRON LTD
67 citations
96
NAKAMORI YUYA
1 patent
US8674619B2
Mar 18, 2014
High frequency power supply device
NAKAMORI YUYA
3 citations
49