Inventor
KIKUCHI TOSHIHIKO
JP9 patents
⚠️ This page may combine multiple inventors who share the name “KIKUCHI TOSHIHIKO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
3 patentsUS7663760B2Feb 16, 2010
Method for calculating optical constants and substrate processing system
TOKYO ELECTRON LTD2 citations60
US6950186B2Sep 27, 2005
Polarization analyzing method
TOKYO ELECTRON LTD2 citations60
US10768089B2Sep 8, 2020
Particle collecting apparatus and particle collecting system
TOKYO ELECTRON LTD0 citations36