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Inventor
DAHL MANFRED
DE
2 patents
Patents
2 patents
US7286245B2
Oct 23, 2007
Method and apparatus for determining the influencing of the state of polarization by an optical system; and an analyser
ZEISS CARL SMT AG
28 citations
91
US7400388B2
Jul 15, 2008
Method for determining distortion and/or image surface
ZEISS CARL SMT AG
3 citations
59