Inventor

MACDONALD PAUL D

US2 patents

Patents

2 patents

US7960670B2Jun 14, 2011

Methods of and apparatuses for measuring electrical parameters of a plasma process

KLA TENCOR CORP13 citations82

US7482576B2Jan 27, 2009

Apparatuses for and methods of monitoring optical radiation parameters for substrate processing operations

KLA TENCOR CORP8 citations81