Inventor

HALL DANIEL LESLIE

US2 patents

Patents

2 patents

US12174552B2Dec 24, 2024

Lithographic apparatus and electrostatic clamp designs

ASML HOLDING NV0 citations58

US11550231B2Jan 10, 2023

Apparatus for and method of in-situ particle removal in a lithography apparatus

ASML HOLDING NV1 citations53