Inventor
CHEN YINGQIAN
SG3 patents
Patents
3 patentsUS11658025B2May 23, 2023
Chalcogen precursors for deposition of silicon nitride
APPLIED MATERIALS INC2 citations68
US12550643B2Feb 10, 2026
Oxidants and strained-ring precursors
APPLIED MATERIALS INC0 citations58
US12142477B2Nov 12, 2024
Chalcogen precursors for deposition of silicon nitride
APPLIED MATERIALS INC0 citations57