Inventor

TUMMANAPELLI ANIL KUMAR

SG3 patents

Patents

3 patents

US11658025B2May 23, 2023

Chalcogen precursors for deposition of silicon nitride

APPLIED MATERIALS INC2 citations68

US12550643B2Feb 10, 2026

Oxidants and strained-ring precursors

APPLIED MATERIALS INC0 citations58

US12142477B2Nov 12, 2024

Chalcogen precursors for deposition of silicon nitride

APPLIED MATERIALS INC0 citations57