Inventor

FROMMEYER ANDREAS

DE7 patents

⚠️ This page may combine multiple inventors who share the name “FROMMEYER ANDREAS”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

ZEISS CARL SMT AG

4 patents

US7760327B2Jul 20, 2010

Reflecting optical element with eccentric optical passageway

ZEISS CARL SMT AG8 citations82

US7448763B2Nov 11, 2008

Optical subassembly and projection objective in semiconductor lithography

ZEISS CARL SMT AG7 citations70

US7777963B2Aug 17, 2010

Method for improving the imaging properties of a projection objective, and such a projection objective

ZEISS CARL SMT AG3 citations62

US7540983B2Jun 2, 2009

Method of producing aspherical optical surfaces

ZEISS CARL SMT AG0 citations36

VOGLER ALEXANDER

1 patent

US9513452B2Dec 6, 2016

Damping device

VOGLER ALEXANDER7 citations73

CONRADI OLAF

1 patent

US9069263B2Jun 30, 2015

Method for improving the imaging properties of a projection objective, and such a projection objective

CONRADI OLAF1 citations60

ZEISS CARL SMT GMBH

1 patent

US9581813B2Feb 28, 2017

Method for improving the imaging properties of a projection objective, and such a projection objective

ZEISS CARL SMT GMBH0 citations51