Inventor · disambiguated record
Ming-Hau Tung
Also filed as: TUNG MING · TUNG MING-HAU
62 granted patents·18 pending applications·1,650 citations·filing 2004–2025
99Inventor score
Top patents by PatentIndex Score
80 records- 0199US7450295B2Methods for producing MEMS with protective coatings using multi-component sacrificial layersQUALCOMM MEMS TECHNOLOGIES INC·Filed 2006·Granted Nov 11, 2008·70 cites·23 claims
- 0299US7355780B2System and method of illuminating interferometric modulators using backlightingIDC LLC·Filed 2005·Granted Apr 8, 2008·82 cites·16 claims
- 0399US7342705B2Spatial light modulator with integrated optical compensation structureIDC LLC·Filed 2005·Granted Mar 11, 2008·95 cites·36 claims
- 0498US9305497B2Systems, devices, and methods for driving an analog interferometric modulatorQUALCOMM MEMS TECHNOLOGIES INC·Filed 2013·Granted Apr 5, 2016·145 cites·23 claims
- 0598US7385744B2Support structure for free-standing MEMS device and methods for forming the sameQUALCOMM MEMS TECHNOLOGIES INC·Filed 2006·Granted Jun 10, 2008·72 cites·44 claims
- 0698US7349139B2System and method of illuminating interferometric modulators using backlightingIDC LLC·Filed 2006·Granted Mar 25, 2008·42 cites·16 claims
- 0797US8344470B2Electromechanical devices having support structuresQUALCOMM MEMS TECHNOLOGIES INC·Filed 2011·Granted Jan 1, 2013·15 cites·26 claims
- 0897US7704772B2Method of manufacture for microelectromechanical devicesQUALCOMM MEMS TECHNOLOGIES INC·Filed 2008·Granted Apr 27, 2010·41 cites·17 claims
- 0997US7420728B2Methods of fabricating interferometric modulators by selectively removing a materialIDC LLC·Filed 2005·Granted Sep 2, 2008·41 cites·22 claims
- 1096US7884989B2White interferometric modulators and methods for forming the sameQUALCOMM MEMS TECHNOLOGIES INC·Filed 2007·Granted Feb 8, 2011·24 cites·39 claims
- 1196US7603001B2Method and apparatus for providing back-lighting in an interferometric modulator display deviceQUALCOMM MEMS TECHNOLOGIES INC·Filed 2006·Granted Oct 13, 2009·59 cites·29 claims
- 1296US7567373B2System and method for micro-electromechanical operation of an interferometric modulatorIDC LLC·Filed 2005·Granted Jul 28, 2009·57 cites·26 claims
- 1396US7527998B2Method of manufacturing MEMS devices providing air gap controlQUALCOMM MEMS TECHNOLOGIES INC·Filed 2006·Granted May 5, 2009·28 cites·19 claims
- 1496US7476327B2Method of manufacture for microelectromechanical devicesIDC LLC·Filed 2004·Granted Jan 13, 2009·96 cites·14 claims
- 1595US7952789B2MEMS devices with multi-component sacrificial layersQUALCOMM MEMS TECHNOLOGIES INC·Filed 2010·Granted May 31, 2011·10 cites·31 claims
- 1695US7630119B2Apparatus and method for reducing slippage between structures in an interferometric modulatorQUALCOMM MEMS TECHNOLOGIES INC·Filed 2005·Granted Dec 8, 2009·37 cites·26 claims
- 1795US7612932B2Microelectromechanical device with optical function separated from mechanical and electrical functionIDC LLC·Filed 2007·Granted Nov 3, 2009·47 cites·36 claims
- 1895US7595926B2Integrated IMODS and solar cells on a substrateQUALCOMM MEMS TECHNOLOGIES INC·Filed 2007·Granted Sep 29, 2009·24 cites·16 claims
- 1995US7566940B2Electromechanical devices having overlying support structuresQUALCOMM MEMS TECHNOLOGIES INC·Filed 2006·Granted Jul 28, 2009·35 cites·30 claims
- 2095US7566664B2Selective etching of MEMS using gaseous halides and reactive co-etchantsQUALCOMM MEMS TECHNOLOGIES INC·Filed 2006·Granted Jul 28, 2009·58 cites·37 claims
- 2194US8120125B2MEMS devices having overlying support structuresSASAGAWA TERUO·Filed 2011·Granted Feb 21, 2012·10 cites·15 claims
- 2294US8111445B2Spatial light modulator with integrated optical compensation structureCHUI CLARENCE·Filed 2008·Granted Feb 7, 2012·15 cites·33 claims
- 2394US7875485B2Methods of fabricating MEMS devices having overlying support structuresQUALCOMM MEMS TECHNOLOGIES INC·Filed 2009·Granted Jan 25, 2011·21 cites·39 claims
- 2494US7742220B2Microelectromechanical device and method utilizing conducting layers separated by stopsQUALCOMM MEMS TECHNOLOGIES INC·Filed 2007·Granted Jun 22, 2010·33 cites·31 claims
- 2594US7429334B2Methods of fabricating interferometric modulators by selectively removing a materialIDC LLC·Filed 2005·Granted Sep 30, 2008·24 cites·26 claims
- 2693US7944599B2Electromechanical device with optical function separated from mechanical and electrical functionQUALCOMM MEMS TECHNOLOGIES INC·Filed 2007·Granted May 17, 2011·26 cites·43 claims
- 2793US7715079B2MEMS devices requiring no mechanical supportQUALCOMM MEMS TECHNOLOGIES INC·Filed 2007·Granted May 11, 2010·29 cites·43 claims
- 2893US7660058B2Methods for etching layers within a MEMS device to achieve a tapered edgeQUALCOMM MEMS TECHNOLOGIES INC·Filed 2006·Granted Feb 9, 2010·22 cites·19 claims
- 2993US7630114B2Diffusion barrier layer for MEMS devicesIDC LLC·Filed 2005·Granted Dec 8, 2009·27 cites·29 claims
- 3093US7349141B2Method and post structures for interferometric modulationIDC LLC·Filed 2005·Granted Mar 25, 2008·49 cites·16 claims
- 3192US7948671B2Apparatus and method for reducing slippage between structures in an interferometric modulatorQUALCOMM MEMS TECHNOLOGIES INC·Filed 2009·Granted May 24, 2011·21 cites·17 claims
- 3292US7933475B2Method and apparatus for providing back-lighting in a display deviceQUALCOMM MEMS TECHNOLOGIES INC·Filed 2009·Granted Apr 26, 2011·25 cites·23 claims
- 3392US7781850B2Controlling electromechanical behavior of structures within a microelectromechanical systems deviceQUALCOMM MEMS TECHNOLOGIES INC·Filed 2005·Granted Aug 24, 2010·24 cites·11 claims
- 3492US7719747B2Method and post structures for interferometric modulationQUALCOMM MEMS TECHNOLOGIES INC·Filed 2008·Granted May 18, 2010·38 cites·45 claims
- 3591US7936031B2MEMS devices having support structuresQUALCOMM MEMS TECHNOLOGIES INC·Filed 2006·Granted May 3, 2011·16 cites·28 claims
- 3691US7623287B2Non-planar surface structures and process for microelectromechanical systemsQUALCOMM MEMS TECHNOLOGIES INC·Filed 2006·Granted Nov 24, 2009·23 cites·39 claims
- 3790US8045252B2Spatial light modulator with integrated optical compensation structureQUALCOMM MEMS TECHNOLOGIES INC·Filed 2008·Granted Oct 25, 2011·15 cites·34 claims
- 3890US7952787B2Method of manufacturing MEMS devices providing air gap controlQUALCOMM MEMS TECHNOLOGIES INC·Filed 2009·Granted May 31, 2011·11 cites·23 claims
- 3990US7924494B2Apparatus and method for reducing slippage between structures in an interferometric modulatorQUALCOMM MEMS TECHNOLOGIES INC·Filed 2009·Granted Apr 12, 2011·16 cites·31 claims
- 4090US7835061B2Support structures for free-standing electromechanical devicesQUALCOMM MEMS TECHNOLOGIES INC·Filed 2006·Granted Nov 16, 2010·21 cites·36 claims
- 4190US7405863B2Patterning of mechanical layer in MEMS to reduce stresses at supportsQUALCOMM MEMS TECHNOLOGIES INC·Filed 2006·Granted Jul 29, 2008·23 cites·22 claims
- 4289US7553684B2Method of fabricating interferometric devices using lift-off processing techniquesIDC LLC·Filed 2005·Granted Jun 30, 2009·18 cites·18 claims
- 4388US8278726B2Controlling electromechanical behavior of structures within a microelectromechanical systems deviceMILES MARK W·Filed 2010·Granted Oct 2, 2012·8 cites·31 claims
- 4487US8289613B2Electromechanical device with optical function separated from mechanical and electrical functionCHUI CLARENCE·Filed 2011·Granted Oct 16, 2012·7 cites·32 claims
- 4586US12274025B2Method for fabricating MEMS-based cooling systemsFRORE SYSTEMS INC·Filed 2021·Granted Apr 8, 2025·1 cites·5 claims
- 4685US7580172B2MEMS device and interconnects for sameQUALCOMM MEMS TECHNOLOGIES INC·Filed 2006·Granted Aug 25, 2009·14 cites·47 claims
- 4783US9001412B2Electromechanical device with optical function separated from mechanical and electrical functionQUALCOMM MEMS TECHNOLOGIES INC·Filed 2012·Granted Apr 7, 2015·5 cites·42 claims
- 4881US8040588B2System and method of illuminating interferometric modulators using backlightingQUALCOMM MEMS TECHNOLOGIES INC·Filed 2008·Granted Oct 18, 2011·4 cites·57 claims
- 4979US8964280B2Method of manufacturing MEMS devices providing air gap controlTUNG MING-HAU·Filed 2012·Granted Feb 24, 2015·2 cites·38 claims
- 5078US8115988B2System and method for micro-electromechanical operation of an interferometric modulatorCHUI CLARENCE·Filed 2008·Granted Feb 14, 2012·7 cites·30 claims
Showing the top 50 of 80 patent records by PatentIndex Score.
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