P

Inventor

PENG JUI-CHUNG

TW9 patents
⚠️ This page may combine multiple inventors who share the name “PENG JUI-CHUNG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

TAIWAN SEMICONDUCTOR MFG

3 patents
US7795601B2Sep 14, 2010

Method and apparatus to improve lithography throughput

TAIWAN SEMICONDUCTOR MFG4 citations62
US7738692B2Jun 15, 2010

Methods of determining quality of a light source

TAIWAN SEMICONDUCTOR MFG3 citations58
US7571021B2Aug 4, 2009

Method and system for improving critical dimension uniformity

TAIWAN SEMICONDUCTOR MFG1 citations50

PENG JUI-CHUNG

2 patents
US8199314B2Jun 12, 2012

System and method for improving immersion scanner overlay performance

PENG JUI-CHUNG12 citations81
US8068208B2Nov 29, 2011

System and method for improving immersion scanner overlay performance

PENG JUI-CHUNG5 citations71

TAIWAN SEMICONDUCTOR MFG CO LTD

2 patents
USRE47272EMar 5, 2019

Methods of determining quality of a light source

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations47
USRE47197EJan 8, 2019

Methods of determining quality of a light source

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations47

CHEN NAN-JUNG

1 patent
US8184896B2May 22, 2012

Methods of determining quality of a light source

CHEN NAN-JUNG0 citations41

LIN CHIEN-HSUN

1 patent
US9529275B2Dec 27, 2016

Lithography scanner throughput

LIN CHIEN-HSUN0 citations38