Inventor
LIN CHIEN-HSUN
TW9 patents
⚠️ This page may combine multiple inventors who share the name “LIN CHIEN-HSUN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TAIWAN SEMICONDUCTOR MFG
3 patentsUS6979820B2Dec 27, 2005
CD SEM automatic focus methodology and apparatus for constant electron beam dosage control
TAIWAN SEMICONDUCTOR MFG9 citations73
US7571021B2Aug 4, 2009
Method and system for improving critical dimension uniformity
TAIWAN SEMICONDUCTOR MFG1 citations50
US7787977B2Aug 31, 2010
Methods and systems for forming semiconductor structures
TAIWAN SEMICONDUCTOR MFG0 citations38