Inventor

GUO YAO-WEN

TW5 patents

⚠️ This page may combine multiple inventors who share the name “GUO YAO-WEN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

PENG JUI-CHUNG

2 patents

US8199314B2Jun 12, 2012

System and method for improving immersion scanner overlay performance

PENG JUI-CHUNG12 citations81

US8068208B2Nov 29, 2011

System and method for improving immersion scanner overlay performance

PENG JUI-CHUNG5 citations71

TAIWAN SEMICONDUCTOR MFG

2 patents

US7571021B2Aug 4, 2009

Method and system for improving critical dimension uniformity

TAIWAN SEMICONDUCTOR MFG1 citations50

US7787977B2Aug 31, 2010

Methods and systems for forming semiconductor structures

TAIWAN SEMICONDUCTOR MFG0 citations38

LIN CHIEN-HSUN

1 patent

US9529275B2Dec 27, 2016

Lithography scanner throughput

LIN CHIEN-HSUN0 citations38