Inventor

ISHIGO KAZUTAKA

JP9 patents

⚠️ This page may combine multiple inventors who share the name “ISHIGO KAZUTAKA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

TOSHIBA KK

4 patents

US7906258B2Mar 15, 2011

Photomask, photomask superimposition correcting method, and manufacturing method of semiconductor device

TOSHIBA KK2 citations62

US8034515B2Oct 11, 2011

Pattern forming method, pattern designing method, and mask set

TOSHIBA KK2 citations59

US8364437B2Jan 29, 2013

Mark arrangement inspecting method, mask data, and manufacturing method of semiconductor device

TOSHIBA KK1 citations47

US7973419B2Jul 5, 2011

Semiconductor device and method of fabricating the same

TOSHIBA KK0 citations45

ISHIGO KAZUTAKA

2 patents

US9158212B2Oct 13, 2015

Exposure apparatus, exposure control system, and exposure method

ISHIGO KAZUTAKA7 citations77

US9250542B2Feb 2, 2016

Overlay/alignment measurement method and overlay/alignment measurement apparatus

ISHIGO KAZUTAKA0 citations35

FUKUHARA KAZUYA

1 patent

US8072601B2Dec 6, 2011

Pattern monitor mark and monitoring method suitable for micropattern

FUKUHARA KAZUYA7 citations82

OKAMOTO YOSUKE

1 patent

US8790851B2Jul 29, 2014

Mask and method for fabricating semiconductor device

OKAMOTO YOSUKE2 citations54

TOSHIBA MEMORY CORP

1 patent

US9941177B2Apr 10, 2018

Pattern accuracy detecting apparatus and processing system

TOSHIBA MEMORY CORP0 citations37