Inventor
VASCHENKO GEORGIY O
US18 patents
⚠️ This page may combine multiple inventors who share the name “VASCHENKO GEORGIY O”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASML NETHERLANDS BV
8 patentsUS9392678B2Jul 12, 2016
Target material supply apparatus for an extreme ultraviolet light source
ASML NETHERLANDS BV5 citations83
US9632418B2Apr 25, 2017
Target material supply apparatus for an extreme ultraviolet light source
ASML NETHERLANDS BV2 citations72
US8969839B2Mar 3, 2015
Laser produced plasma EUV light source
ASML NETHERLANDS BV2 citations62
US8969840B2Mar 3, 2015
Droplet generator with actuator induced nozzle cleaning
ASML NETHERLANDS BV3 citations61
US10904994B2Jan 26, 2021
Supply system for an extreme ultraviolet light source
ASML NETHERLANDS BV0 citations60
US10481498B2Nov 19, 2019
Droplet generator for lithographic apparatus, EUV source and lithographic apparatus
ASML NETHERLANDS BV1 citations57
US10499485B2Dec 3, 2019
Supply system for an extreme ultraviolet light source
ASML NETHERLANDS BV0 citations50
US10632505B2Apr 28, 2020
System method and apparatus for high pressure liquid jet cleaning of sintered filters
ASML NETHERLANDS BV0 citations34
VASCHENKO GEORGIY O
5 patentsUS8158960B2Apr 17, 2012
Laser produced plasma EUV light source
VASCHENKO GEORGIY O35 citations92
US8138487B2Mar 20, 2012
System, method and apparatus for droplet catcher for prevention of backsplash in a EUV generation chamber
VASCHENKO GEORGIY O16 citations92
US8969838B2Mar 3, 2015
Systems and methods for protecting an EUV light source chamber from high pressure source material leaks
VASCHENKO GEORGIY O4 citations62
US8530871B2Sep 10, 2013
Laser produced plasma EUV light source
VASCHENKO GEORGIY O4 citations61
US8319201B2Nov 27, 2012
Laser produced plasma EUV light source having a droplet stream produced using a modulated disturbance wave
VASCHENKO GEORGIY O2 citations61