Inventor
LI CHENGHONG
US9 patents
⚠️ This page may combine multiple inventors who share the name “LI CHENGHONG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
BREWER SCIENCE INC
4 patentsUS7316844B2Jan 8, 2008
Spin-on protective coatings for wet-etch processing of microelectronic substrates
BREWER SCIENCE INC17 citations89
US7364832B2Apr 29, 2008
Wet developable hard mask in conjunction with thin photoresist for micro photolithography
BREWER SCIENCE INC11 citations80
US7758913B2Jul 20, 2010
Spin-on protective coatings for wet-etch processing of microelectronic substrates
BREWER SCIENCE INC2 citations59
US7695890B2Apr 13, 2010
Negative photoresist for silicon KOH etch without silicon nitride
BREWER SCIENCE INC3 citations59