Inventor

GELPEY JEFF

US2 patents

⚠️ This page may combine multiple inventors who share the name “GELPEY JEFF”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

MATTSON TECH INC

1 patent

US6303520B1Oct 16, 2001

Silicon oxynitride film

MATTSON TECH INC28 citations89

CENTROTHERM THERMAL SOLUTIONS GMBH & CO KG

1 patent

US9612158B2Apr 4, 2017

Device for determining the temperature of a substrate

CENTROTHERM THERMAL SOLUTIONS GMBH & CO KG0 citations39