Inventor
MUI DAVID S L
US14 patents
⚠️ This page may combine multiple inventors who share the name “MUI DAVID S L”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
7 patentsUS6924191B2Aug 2, 2005
Method for fabricating a gate structure of a field effect transistor
APPLIED MATERIALS INC452 citations99
US6699399B1Mar 2, 2004
Self-cleaning etch process
APPLIED MATERIALS INC500 citations98
US6136211AOct 24, 2000
Self-cleaning etch process
APPLIED MATERIALS INC160 citations98
US6960416B2Nov 1, 2005
Method and apparatus for controlling etch processes during fabrication of semiconductor devices
APPLIED MATERIALS INC65 citations95
US7498106B2Mar 3, 2009
Method and apparatus for controlling etch processes during fabrication of semiconductor devices
APPLIED MATERIALS INC18 citations92
US6924088B2Aug 2, 2005
Method and system for realtime CD microloading control
APPLIED MATERIALS INC19 citations92
US7482178B2Jan 27, 2009
Chamber stability monitoring using an integrated metrology tool
APPLIED MATERIALS INC8 citations83
MUI DAVID S L
4 patentsUS8211846B2Jul 3, 2012
Materials for particle removal by single-phase and two-phase media
MUI DAVID S L3 citations59
US8084406B2Dec 27, 2011
Apparatus for particle removal by single-phase and two-phase media
MUI DAVID S L3 citations59
US8226775B2Jul 24, 2012
Methods for particle removal by single-phase and two-phase media
MUI DAVID S L0 citations48
US8314055B2Nov 20, 2012
Materials and systems for advanced substrate cleaning
MUI DAVID S L0 citations39