Inventor
SRINIVASAN SATISH
US10 patents
⚠️ This page may combine multiple inventors who share the name “SRINIVASAN SATISH”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
LAM RES CORP
5 patentsUS12198902B2Jan 14, 2025
Laminated aerosol deposition coating for aluminum components for plasma processing chambers
LAM RES CORP1 citations61
US12129569B2Oct 29, 2024
Method for conditioning semiconductor processing chamber components
LAM RES CORP0 citations60
US11087961B2Aug 10, 2021
Quartz component with protective coating
LAM RES CORP0 citations58
US12249490B2Mar 11, 2025
Single crystal metal oxide plasma chamber component
LAM RES CORP0 citations55
US9947558B2Apr 17, 2018
Method for conditioning silicon part
LAM RES CORP0 citations49
MUI DAVID S L
3 patentsUS8211846B2Jul 3, 2012
Materials for particle removal by single-phase and two-phase media
MUI DAVID S L3 citations59
US8084406B2Dec 27, 2011
Apparatus for particle removal by single-phase and two-phase media
MUI DAVID S L3 citations59
US8226775B2Jul 24, 2012
Methods for particle removal by single-phase and two-phase media
MUI DAVID S L0 citations48