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Inventor

KON SHIH-CHUNG

US6 patents
⚠️ This page may combine multiple inventors who share the name “KON SHIH-CHUNG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

MUI DAVID S L

3 patents
US8211846B2Jul 3, 2012

Materials for particle removal by single-phase and two-phase media

MUI DAVID S L3 citations59
US8084406B2Dec 27, 2011

Apparatus for particle removal by single-phase and two-phase media

MUI DAVID S L3 citations59
US8226775B2Jul 24, 2012

Methods for particle removal by single-phase and two-phase media

MUI DAVID S L0 citations48

LAM RES CORP

2 patents
US12347650B2Jul 1, 2025

Substrate processing system including dual ion filter for downstream plasma

LAM RES CORP0 citations59
US11967486B2Apr 23, 2024

Substrate processing system including dual ion filter for downstream plasma

LAM RES CORP0 citations59

PENG GRANT

1 patent
US8585825B2Nov 19, 2013

Acoustic assisted single wafer wet clean for semiconductor wafer process

PENG GRANT2 citations53