Inventor
WATANABE TERUYUKI
JP14 patents
⚠️ This page may combine multiple inventors who share the name “WATANABE TERUYUKI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
EBARA CORP
11 patentsUS7087117B2Aug 8, 2006
Substrate processing apparatus and substrate processing method
EBARA CORP23 citations92
US7575636B2Aug 18, 2009
Substrate processing apparatus and substrate processing method
EBARA CORP8 citations84
US7442257B2Oct 28, 2008
Substrate processing apparatus and substrate processing method
EBARA CORP9 citations84
US7368016B2May 6, 2008
Substrate processing unit and substrate processing apparatus
EBARA CORP15 citations84
US7585205B2Sep 8, 2009
Substrate polishing apparatus and method
EBARA CORP7 citations73
US7235135B2Jun 26, 2007
Substrate processing apparatus and substrate processing method
EBARA CORP9 citations71
US7886685B2Feb 15, 2011
Substrate holding apparatus, substrate holding method, and substrate processing apparatus
EBARA CORP2 citations62
US7976362B2Jul 12, 2011
Substrate polishing apparatus and method
EBARA CORP1 citations52
US7735450B2Jun 15, 2010
Substrate holding apparatus
EBARA CORP0 citations52
US7959977B2Jun 14, 2011
Substrate processing method and apparatus
EBARA CORP0 citations51
US7735451B2Jun 15, 2010
Substrate processing method and apparatus
EBARA CORP0 citations51