P

Inventor

MOTOJIMA YASUYUKI

JP4 patents
⚠️ This page may combine multiple inventors who share the name “MOTOJIMA YASUYUKI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

EBARA CORP

3 patents
US7235135B2Jun 26, 2007

Substrate processing apparatus and substrate processing method

EBARA CORP9 citations71
US7959977B2Jun 14, 2011

Substrate processing method and apparatus

EBARA CORP0 citations51
US7735451B2Jun 15, 2010

Substrate processing method and apparatus

EBARA CORP0 citations51

KATSUOKA SEIJI

1 patent
US8225803B2Jul 24, 2012

Substrate processing method and apparatus

KATSUOKA SEIJI1 citations59