Inventor

EDINGER KLAUS

DE32 patents

⚠️ This page may combine multiple inventors who share the name “EDINGER KLAUS”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

EDINGER KLAUS

ZEISS CARL SMT GMBH

Method and apparatus for analyzing and for removing a defect of an EUV photomask

Apparatus and method for examining a surface of a mask

Method and apparatuses for disposing of excess material of a photolithographic mask

Method and apparatuses for disposing of excess material of a photolithographic mask

Method and apparatuses for disposing of excess material of a photolithographic mask

Device and method for analyzing a defect of a photolithographic mask or of a wafer

Device and method for analysing a defect of a photolithographic mask or of a wafer

Apparatus and method for removing a single particulate from a substrate

Apparatus and method for removing a single particulate from a substrate

Scanning probe microscope and method for examining a surface with a high aspect ratio

AUTH NICOLE

Method for electron beam induced etching of layers contaminated with gallium

Method for electron beam induced etching

Methods and systems for removing a material from a sample

Method for electron beam induced deposition of conductive material

UNIV MARYLAND

Procedure for etching of materials at the surface with focussed electron beam induced chemical reactions at said surface

Focused ion-beam fabrication of fiber probes for use in near field scanning optical microscopy

High resolution scanning thermal probe and method of manufacturing thereof

NAWOTEC GMBH

Procedure for etching of materials at the surface with focussed electron beam induced chemical reaction at said surface

Apparatus and method for investigating or modifying a surface with a beam of charged particles

Procedure for etching of materials at the surface with focussed electron beam induced chemical reactions at said surface

WARD BILLY W

Ion sources, systems and methods

Ion sources, systems and methods

CARL ZEISS MICROSCOPY LLC

Ion sources, systems and methods

Ion sources, systems and methods

ZEISS CARL SMS GMBH

Apparatus and method for analyzing and modifying a specimen surface

Apparatus and method for investigating an object

ALIS CORP

Ion sources, systems and methods

EDINGER KLAUS

Apparatus and method for investigating and/or modifying a sample

UNIV KASSEL

Field effect transistor sensor

BUDACH MICHAEL

Method and apparatus for analyzing and/or repairing of an EUV mask defect

NAWO TEC GMBH

Method for high-resolution processing of thin layers using electron beams

GÖLZHÄUSER Armin

Perforated membranes