P

Inventor

CHEN JIAN J

US57 patents
⚠️ This page may combine multiple inventors who share the name “CHEN JIAN J”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

APPLIED MATERIALS INC

19 patents
US9157730B2Oct 13, 2015

PECVD process

APPLIED MATERIALS INC49 citations97
US9816187B2Nov 14, 2017

PECVD process

APPLIED MATERIALS INC8 citations92
US9458537B2Oct 4, 2016

PECVD process

APPLIED MATERIALS INC12 citations92
US10793954B2Oct 6, 2020

PECVD process

APPLIED MATERIALS INC3 citations84
US10060032B2Aug 28, 2018

PECVD process

APPLIED MATERIALS INC3 citations84
US11613812B2Mar 28, 2023

PECVD process

APPLIED MATERIALS INC2 citations73
US10128118B2Nov 13, 2018

Bottom and side plasma tuning having closed loop control

APPLIED MATERIALS INC2 citations73
US10125422B2Nov 13, 2018

High impedance RF filter for heater with impedance tuning device

APPLIED MATERIALS INC4 citations73
US10032608B2Jul 24, 2018

Apparatus and method for tuning electrode impedance for high frequency radio frequency and terminating low frequency radio frequency to ground

APPLIED MATERIALS INC4 citations73
US9865431B2Jan 9, 2018

Apparatus and method for tuning a plasma profile using a tuning electrode in a processing chamber

APPLIED MATERIALS INC5 citations73
US10347465B2Jul 9, 2019

Apparatus and method for tuning a plasma profile using a tuning electrode in a processing chamber

APPLIED MATERIALS INC3 citations67
US9386680B2Jul 5, 2016

Detecting plasma arcs by monitoring RF reflected power in a plasma processing chamber

APPLIED MATERIALS INC4 citations67
US11898249B2Feb 13, 2024

PECVD process

APPLIED MATERIALS INC0 citations62
US10910227B2Feb 2, 2021

Bottom and side plasma tuning having closed loop control

APPLIED MATERIALS INC0 citations62
US10580626B2Mar 3, 2020

Arcing detection apparatus for plasma processing

APPLIED MATERIALS INC1 citations62
US10450653B2Oct 22, 2019

High impedance RF filter for heater with impedance tuning device

APPLIED MATERIALS INC1 citations62
US10030306B2Jul 24, 2018

PECVD apparatus and process

APPLIED MATERIALS INC1 citations62
US10325800B2Jun 18, 2019

High temperature electrostatic chucking with dielectric constant engineered in-situ charge trap materials

APPLIED MATERIALS INC1 citations59
US12539577B2Feb 3, 2026

System and method for detecting a membrane failure in a chemical mechanical polishing system

APPLIED MATERIALS INC0 citations51

AMGEN INC

10 patents

LAM RES CORP

9 patents

CHEN JIAN J

3 patents

OPTIWORK INC

2 patents

ALLEN JENNIFER R

1 patent

SEAGATE TECHNOLOGY LLC

1 patent

OSRAM SYLVANIA INC

1 patent

OPTIWORKS INC

1 patent

NICHOL SCOTT

1 patent

DE MORIN FRENEL F

1 patent

BROWN JAMES

1 patent

Showing the top 50 of 57 patents by PatentIndex Score.