Inventor

SONDERMAN THOMAS J

US36 patents

⚠️ This page may combine multiple inventors who share the name “SONDERMAN THOMAS J”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

SONDERMAN THOMAS J

ADVANCED MICRO DEVICES INC

Method and apparatus for predicting electrical parameters using measured and predicted fabrication parameters

Dynamic process state adjustment of a processing tool to reduce non-uniformity

Method and apparatus for utilizing integrated metrology data as feed-forward data

Method and apparatus for determining output characteristics using tool state data

Control methodology using optical emission spectroscopy derived data, system for performing same

Method and apparatus for incorporating control simulation environment

Method and apparatus for using equipment state data for run-to-run control of manufacturing tools

Method and apparatus for determining a sampling plan based on process and equipment state information

Method and apparatus for determining control actions incorporating defectivity effects

Method and apparatus for determining a sampling plan based on process and equipment fingerprinting

Method and apparatus for combining integrated and offline metrology for process control

Method and apparatus for controlling a plating process

Plasma state monitoring to control etching processes and across-wafer uniformity, and system for performing same

Method and apparatus for initializing tool controllers based on tool event data

Method and apparatus for dynamically monitoring controller tuning parameters

Process control based upon a metrology delay

Method and apparatus for adaptively scheduling tool maintenance

Method for prioritizing production lots based on grade estimates and output requirements

Method and apparatus for controlling a tool using a baseline control script

Method and apparatus for controlling process target values based on manufacturing metrics

Method and apparatus for integrating multiple process controllers

Process control based on an estimated process result

Method and apparatus for controlling the flow of wafers through a process flow

Method and apparatus for updating control state variables of a process control model based on rework data

Method and apparatus for distinguishing between sources of process variation

Dynamic targeting for a process control system

Method of controlling wafer charging effects due to manufacturing processes

Secondary process controller for supplementing a primary process controller

Methods for dynamically controlling etch endpoint time, and system for accomplishing same

Determining transmission of error effects for improving parametric performance

Method of forming a gate insulation layer for a semiconductor device by controlling the duration of an etch process, and system for accomplishing same

Methods of controlling properties and characteristics of a gate insulation layer based upon electrical test data, and system for performing same

GLOBALFOUNDRIES INC

Dynamic adaptive sampling rate for model prediction

Parallel fault detection

ADVANCED MIRCO DEVICES INC

Total tool control for semiconductor manufacturing

SONDERMAN THOMAS J

Process control using analysis of an upstream process