Inventor

NANJANGUD SAVITHA

US3 patents

⚠️ This page may combine multiple inventors who share the name “NANJANGUD SAVITHA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

APPLIED MATERIALS INC

2 patents

US6632124B2Oct 14, 2003

Optical monitoring in a two-step chemical mechanical polishing process

APPLIED MATERIALS INC17 citations92

US6506097B1Jan 14, 2003

Optical monitoring in a two-step chemical mechanical polishing process

APPLIED MATERIALS INC36 citations92

FOUQUET CHRISTOPHE

1 patent

US9710903B2Jul 18, 2017

System and method for detecting design and process defects on a wafer using process monitoring features

FOUQUET CHRISTOPHE10 citations77