Inventor
TIAN CAIZHONG
JP9 patents
⚠️ This page may combine multiple inventors who share the name “TIAN CAIZHONG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TIAN CAIZHONG
4 patentsUS8967080B2Mar 3, 2015
Top plate of microwave plasma processing apparatus, plasma processing apparatus and plasma processing method
TIAN CAIZHONG10 citations81
US8480848B2Jul 9, 2013
Plasma processing apparatus
TIAN CAIZHONG1 citations49
US8273210B2Sep 25, 2012
Plasma processing apparatus and method for adjusting plasma density distribution
TIAN CAIZHONG0 citations49
US8387560B2Mar 5, 2013
Plasma processing unit
TIAN CAIZHONG0 citations39
TOKYO ELECTRON LTD
4 patentsUS8925351B2Jan 6, 2015
Manufacturing method of top plate of plasma processing apparatus
TOKYO ELECTRON LTD5 citations72
US9048070B2Jun 2, 2015
Dielectric window for plasma treatment device, and plasma treatment device
TOKYO ELECTRON LTD3 citations61
US8343308B2Jan 1, 2013
Ceiling plate and plasma process apparatus
TOKYO ELECTRON LTD4 citations61
US7895971B2Mar 1, 2011
Microwave plasma processing apparatus
TOKYO ELECTRON LTD3 citations61