Inventor
HERMAN TIMOTHY L
US3 patents
Patents
3 patentsUS6261524B1Jul 17, 2001
Advanced apparatus for abatement of gaseous pollutants
ADVANCED TECH MATERIALS46 citations91
US6511641B2Jan 28, 2003
Method for abatement of gaseous pollutants
ADVANCED TECH MATERIALS39 citations89
US6182325B1Feb 6, 2001
Chamber cleaning mechanism
ADVANCED TECH MATERIALS8 citations69