Inventor
ABDALLAH JASSEM A
US5 patents
Patents
5 patentsUS8853085B1Oct 7, 2014
Grapho-epitaxy DSA process with dimension control of template pattern
IBM47 citations97
US8859433B2Oct 14, 2014
DSA grapho-epitaxy process with etch stop material
IBM21 citations91
US9190285B1Nov 17, 2015
Rework and stripping of complex patterning layers using chemical mechanical polishing
IBM11 citations82
US9123658B2Sep 1, 2015
Grapho-epitaxy DSA process with dimension control of template pattern
IBM2 citations62
US9934980B2Apr 3, 2018
Rework and stripping of complex patterning layers using chemical mechanical polishing
IBM0 citations50