Inventor

SIVARAMAN GANGADHARAN

IN3 patents

Patents

3 patents

US9766187B2Sep 19, 2017

Repeater detection

KLA TENCOR CORP2 citations70

US9996942B2Jun 12, 2018

Sub-pixel alignment of inspection to design

KLA TENCOR CORP3 citations69

US10620134B2Apr 14, 2020

Creating defect samples for array regions

KLA TENCOR CORP0 citations35