Inventor

WADA SENJI

JP5 patents

⚠️ This page may combine multiple inventors who share the name “WADA SENJI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

SAMSUNG ELECTRONICS CO LTD

2 patents

US9359382B2Jun 7, 2016

β-ketoimine ligand, method of preparing the same, metal complex comprising the same and method of forming thin film using the same

SAMSUNG ELECTRONICS CO LTD2 citations61

US9359383B2Jun 7, 2016

β-ketoimine ligand, method of preparing the same, metal complex comprising the same and method of forming thin film using the same

SAMSUNG ELECTRONICS CO LTD0 citations50

ADEKA CORP

2 patents

US8003814B2Aug 23, 2011

Metal alkoxide compound, material for forming thin film, and method for producing thin film

ADEKA CORP3 citations57

US8357815B2Jan 22, 2013

Metal compound, material for chemical vapor phase growth, and process for forming metal-containing thin film

ADEKA CORP0 citations49

WADA SENJI

1 patent

US10118940B2Nov 6, 2018

Alkoxide compound and raw material for forming thin film

WADA SENJI2 citations65