Inventor
MAUER LAURA
US10 patents
⚠️ This page may combine multiple inventors who share the name “MAUER LAURA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
VEECO PRECISION SURFACE PROC LLC
6 patentsUS10553502B2Feb 4, 2020
Two etch method for achieving a wafer thickness profile
VEECO PRECISION SURFACE PROC LLC1 citations58
US10026660B2Jul 17, 2018
Method of etching the back of a wafer to expose TSVs
VEECO PRECISION SURFACE PROC LLC0 citations48
US10541180B2Jan 21, 2020
Apparatus and method for wafer thinning in advanced packaging applications
VEECO PRECISION SURFACE PROC LLC0 citations38
US10446387B2Oct 15, 2019
Apparatus and method to control etch rate through adaptive spiking of chemistry
VEECO PRECISION SURFACE PROC LLC0 citations37
US10443943B2Oct 15, 2019
Apparatus and method to control properties of fluid discharge via refrigerative exhaust
VEECO PRECISION SURFACE PROC LLC0 citations35
US10239031B2Mar 26, 2019
Apparatus and method for mixing fluids with degradational properties
VEECO PRECISION SURFACE PROC LLC0 citations35
VEECO PREC SURFACE PROC LLC
4 patentsUS9541837B2Jan 10, 2017
Apparatus and method for removing challenging polymer films and structures from semiconductor wafers
VEECO PREC SURFACE PROC LLC5 citations68
US9698062B2Jul 4, 2017
System and method for performing a wet etching process
VEECO PREC SURFACE PROC LLC6 citations67
US9333446B2May 10, 2016
Apparatus and method to remove undissolved solids from post process dry film strip solvents
VEECO PREC SURFACE PROC LLC0 citations39
US9694436B2Jul 4, 2017
System and method for flux coat, reflow and clean
VEECO PREC SURFACE PROC LLC0 citations38