Inventor

LAWRENCE ELENA

US6 patents

⚠️ This page may combine multiple inventors who share the name “LAWRENCE ELENA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

VEECO PREC SURFACE PROC LLC

2 patents

US9541837B2Jan 10, 2017

Apparatus and method for removing challenging polymer films and structures from semiconductor wafers

VEECO PREC SURFACE PROC LLC5 citations68

US9698062B2Jul 4, 2017

System and method for performing a wet etching process

VEECO PREC SURFACE PROC LLC6 citations67

VEECO INSTR INC

2 patents

US11004755B2May 11, 2021

Apparatus and method for the minimization of undercut during a UBM etch process

VEECO INSTR INC2 citations67

US11069583B2Jul 20, 2021

Apparatus and method for the minimization of undercut during a UBM etch process

VEECO INSTR INC0 citations46

VEECO PRECISION SURFACE PROC LLC

2 patents

US10553502B2Feb 4, 2020

Two etch method for achieving a wafer thickness profile

VEECO PRECISION SURFACE PROC LLC1 citations58

US10026660B2Jul 17, 2018

Method of etching the back of a wafer to expose TSVs

VEECO PRECISION SURFACE PROC LLC0 citations48