Inventor

NORIMATSU TAKAYOSHI

JP2 patents

Patents

2 patents

US7885387B2Feb 8, 2011

Extreme ultraviolet light and X-ray source target and manufacturing method thereof

UNIV OSAKA0 citations45

US7521702B2Apr 21, 2009

Extreme ultraviolet light source and extreme ultraviolet light source target

UNIV OSAKA0 citations43