Inventor

CHILESE FRANCIS C

US3 patents

⚠️ This page may combine multiple inventors who share the name “CHILESE FRANCIS C”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

KLA TENCOR CORP

2 patents

US9422978B2Aug 23, 2016

Gas bearing assembly for an EUV light source

KLA TENCOR CORP3 citations69

US9389180B2Jul 12, 2016

Methods and apparatus for use with extreme ultraviolet light having contamination protection

KLA TENCOR CORP2 citations60

APPLIED MATERIALS INC

1 patent

US6424879B1Jul 23, 2002

System and method to correct for distortion caused by bulk heating in a substrate

APPLIED MATERIALS INC39 citations90